Through silicon via including multi-material fill

ABSTRACT

An apparatus includes a substrate having at least one via disposed in the substrate, wherein the substrate includes a trench having a substantially trapezoidal cross-section, the trench extending through the substrate between a lower surface of the substrate and an upper surface of the substrate, wherein the top of the trench opens to a top opening, and the bottom of the trench opens to a bottom opening, the top opening being larger than the bottom opening. The apparatus can include a mouth surrounding the top opening and extending between the upper surface and the top opening, wherein a mouth opening in the upper surface is larger than the top opening of the trench, wherein the via includes a dielectric layer disposed on an inside surface of a trench. The apparatus includes and a disposed in the trench, with the dielectric layer sandwiched between the fill and the substrate.

CLAIM OF PRIORITY

This application is a continuation of U.S. patent application Ser. No. 14/023,869, filed on Sep. 11, 2013, which claims the benefit of priority of U.S. Provisional Patent Application Ser. No. 61/700,186, filed on Sep. 12, 2012, the benefit of priority of each of which is claimed hereby, and each of which is incorporated by reference herein in its entirety.

BACKGROUND

Small semiconductor-scale devices such as capacitors are widely used in electronics such as personal electronics. These devices may be used as pressure transducers. For example, the devices can be used as microphones, such as for recording or playing sound. They may be used as motion detectors, functioning as accelerometers and/or gyroscopes. Other uses are possible. As market demand for personal electronics grows, manufacturers seek to benefit from devices of reduced size and decreased cost so that they may create improved personal electronics.

U.S. Pat. No. 7,539,003 provides capacitive sensors with single crystal silicon on all key stress points. Isolating trenches are formed by trench and refill forming dielectrically isolated conductive silicon electrodes for drive, sense and guards, as illustrated in FIG. 1A. The pressure port is opposed to the electrical wire bond pads for ease of packaging. Dual-axis accelerometers measuring in-plane acceleration and out-of-plane acceleration are also described. A third axis in plane is provided by duplicating and rotating the accelerometer 90 degrees about its out-of-plane axis.

As illustrated in FIG. 1A, one of the approaches in U.S. Pat. No. 7,539,003 relies on devices formed using an undesirable single-material dielectric trench 100 configuration. The trench passes through a semiconductor 101 and has two contacts 102. It is difficult to manufacture, at least because it is difficult to deposit fill as shown.

OVERVIEW

This document discusses, among other things, an apparatus including a substrate having at least one via disposed in the substrate, wherein the substrate includes a trench having a substantially trapezoidal cross-section, the trench extending through the substrate between a lower surface of the substrate and an upper surface of the substrate, wherein the top of the trench opens to a top opening, and the bottom of the trench opens to a bottom opening, the top opening being larger than the bottom opening. The apparatus can include a mouth surrounding the top opening and extending between the upper surface and the top opening, wherein a mouth opening in the upper surface is larger than the top opening of the trench, wherein the via includes a dielectric layer disposed on an inside surface of a trench. The apparatus includes and a fill disposed in the trench, with the dielectric layer sandwiched between the fill and the substrate.

This section is intended to provide an overview of subject matter of the present patent application. It is not intended to provide an exclusive or exhaustive explanation of the invention. The detailed description is included to provide further information about the present patent application.

BRIEF DESCRIPTION OF THE DRAWINGS

In the drawings, which are not necessarily drawn to scale, like numerals may describe similar components in different views. Like numerals having different letter suffixes may represent different instances of similar components. The drawings illustrate generally, by way of example, but not by way of limitation, various embodiments discussed in the present document.

FIG. 1A illustrates a cross-section side-view of a device with a single material trench, according to the prior art.

FIG. 1B illustrates a cross-section side-view of a device with overhangs and a void, according to an example.

FIG. 2 illustrates a cross-section side-view of a via with desirable attributes, according to an example.

FIG. 3 illustrates a cross-section side-view of a via with a curvilinear flute, according to an example.

FIG. 4 illustrates a cross-section side-view of a via with substantially linear flute, according to an example.

FIG. 5 illustrates several different views of voids, according to various examples.

FIG. 6 illustrates a cross-section side-view of a device with a multi-material trench, according to an example.

FIG. 7A illustrates a cross-section side-view of a device with a multi-material trench defining a perimeter, according to an example. The perimeter is pictured in

FIG. 7B, which is a sectional taken along line 7A-7A.

FIG. 8A illustrates a cross-section side-view of a device with a multi-material trench defining a perimeter covered by a device layer, according to an example.

FIG. 8B illustrates a cross-section side-view of a device with a multi-material trench defining a perimeter covered by a device layer, showing a capacitive effect, according to an example.

FIG. 9 illustrates a cross-section side-view of a device with a multi-material trench defining a perimeter covered by a device layer defining interdigitated fingers, according to an example.

FIG. 10 illustrates a cross-section side-view of a device with a pressure transducer and motion sensor(s) (gyroscope, accelerometer, magnetometer, etc.) or microphone, according to an example.

FIG. 11 illustrates a cross-section side-view of a device with a cavity disposed in the device layer, according to an example.

FIG. 12 illustrates a cross-section side-view of a device with multiple via substrates, according to an example.

FIG. 13 illustrates a cross-section side-view of a device with a cap over the device layer, according to an example.

FIG. 14 illustrates a cross-section side-view of a device with a cap coveting multiple devices portions of a device layer, according to an example.

FIG. 15 illustrates a cross-section side-view of a device with a multi-material trench, according to an example.

FIG. 16 illustrates a cross-section side-view of a device with a multi-material trench, according to an example.

FIG. 17 illustrates a process illustrated by iterative views of an example semiconductor, according to an example.

FIG. 18 illustrates a process including fusion bonding, according to an example.

FIG. 19 illustrates a cross-section side-view of an optional semiconductor device configured to measure motion, according to an example.

DETAILED DESCRIPTION

The present subject matter addresses shortcomings of the prior art. An approach as outlined in U.S. Pat. No. 7,539,003 can result in structure illustrated in FIG. 1B. The illustration shows undesirable overhangs 104 and undesirable voids 106, as produced by the process discussed beginning in column four of U.S. Pat. No. 7,539,003. According to the approach, achieving a desirable thickness, e.g., 150 μm, of a through-silicon-via (TSV) wafer using deep reactive ion etching (DRIE) of a desirable aspect ratio, for example 30:1, that includes a material 108 such as a conductive material disposed inside a dielectric material 110 such as an oxide can result in an undesirably thick, e.g., 5 μm thick, dielectric trench that is difficult to fill without forming voids 106.

A typical dielectric trench can include silicon dioxide, and formation of such a thick oxide in such a deep trench can be difficult at least because it encourages the form nation of voids 106 that can decrease the likelihood of forming a hermetic seal from the top of the device to the bottom of the device. Such an approach also can create significant stress in the silicon substrate which can affect device integrity, especially in devices having a large density of such deep vias, making wafers prone to cracking. The overhangs 104 contribute to the formation of voids, at least by discouraging a desired level of filling of the cavity in the semiconductor 101.

The present subject matter provides, among other things, through-silicon vias that can survive high temperature wafer bonding, including fusion bonding performed at over 1000 degrees Celsius, with improved manufacturability over prior art. The present subject matter reduces the influence of the above mentioned approaches in some instances by replacing a single material trench with a two-material trench, wherein the second material has a better filling ability and can form vias with fewer or no voids, which can improve sealing, such as hermetic sealing. Certain examples provide an improved trench to enable easier fill of the trench without voids (i.e., one or more voids). Examples provide improved matching of thermal coefficient of expansion (TCE) to monocrystal line silicon than a single material approach. Such an approach can reduce instances of wafer bow and thus improving wafer integrity.

FIG. 2 illustrates a cross-section side-view of a via with desirable attributes, according to an example. In the example, a semiconductor 101, such as a silicon semiconductor, such as a single crystal silicon (SCS) semiconductor, has a via such as a through-silicon via formed therein. In substrate 101 can have a trench 280 disposed partially or entirely therethrough. Fill 203 and dielectric 204 can be sealed to the substrate hermetically. The fill 203 can be recessed below an upper surface 282 of the silicon. A recessed dielectric can reduce instances of contact between the dielectric and a component that may be disposed adjacent the upper surface 282. The combination of the dielectric 204 and the fill 203 can provide for stresses, resulting from formation, that counteract one another to reduce deformation of the substrate 101.

FIG. 3 illustrates a cross-section side-view of a via with a curvilinear flute, according to an example. In the example, a flute or mouth 304 can surround a top opening 383 and can extend from an upper surface 282 and a top opening into the substrate. The mouth can form a part of a monotonically decreasing via cross-sectional width. The mouth 304 can be larger than the top opening 383 of the trench. A mouth etch can be substantially isotropic, or highly tapered (e.g., a highly tapered DRIE). Forming the mouth can include at least one of plasma etching, xenon difluoride etching or wet etching the mouth. The mouth can enable one to undercut masking material disposed on the upper surface 282, which can remove overhangs or overhangs 104. Additionally, the mouth 304 can reduces or eliminate blowout deeper in the trench 280.

The via can be substantially void free, meaning that the 203 conforms to the dielectric 204 and extends out of a cavity defined by the dielectric 204 in a monolithic piece.

The 203 can include at least one of polysilicon or a combination of semiconductor and dielectric. Polysilicon can include undoped super-conformal fine grain polysilicon. Fill 203 can include thermal oxide. Fill 203 can include at least one of tetraethylorthosilicate (TEOS) or another low temperature oxide.

The aspect ratio of height to width can range from 15:1 to 50:1. Depth can range from 0 μm to one or more millimeters. One example defines an aspect ratio of around 30:1 with a depth of between 10 and 200 μm. Compensate the stresses between the materials to result in near zero bow. In some examples, polysilicon is used for fill 203, disposed inside an oxide grown on the silicon. A via that is 175 μm deep via can be formed, and can include a 2 μm thermal oxide and around an 8 μm polysilicon width at the top of the via, with a 2 μm oxide and 4 μm poly-Si width at the bottom.

FIG. 4 illustrates a cross-section side-view of a via with substantially linear mouth, according to an example. In the example, a linear mouth 404 opens to the upper surface 282 and is sized to be larger than atop opening 383 of the trench 280. Small cantilevered overhangs 402 may be formed at the top of the fill 403. This can be a byproduct of an etching process by which dielectric and/or fill are removed to recess the dielectric below the surface 282, as discussed herein, such as in relation to FIG. 17. Although the mouths illustrated in FIGS. 4 and 5 form a taper of a different slope than the remainder of the trench 280, examples can include a smooth transition between the portion of the via that is filled and the remaining portions, as illustrated in FIG. 2. Other configurations are possible such that the mouth is wider than the trench and the overhangs are eliminated.

FIG. 5 illustrates different views of voids, according to various examples. Seams or voids can undesirably reduce the ability of a device to be sealed hermetically. Further, seams or voids can reduce mechanical stability of a device, such as by concentrating bending stresses applied to the device at one place such as the seam. Additionally, seams or voids can create processing difficulties, such as by creating stores in which materials intended to be removed become lodged. These stored materials can then be released during a later process step or in application, and can have undesirably effects on the performance of the device.

Examples disclosed in A and B illustrate a void that is small enough to allow for adequate sealing and structural integrity, including rigidity. In view A the void 504 can collect material, which is undesirable. If the void 504 can be reduced to a small seam that runs less than the length of the fill 502, desirable performance can be achieved.

In view B, the void 516 in 514 can reduce structural integrity. For example, the fill can break open. Such a result could adversely affect device performance. However, if the void 516 is maintained below a size that can cause breakage at a specified stress, desirable performance can be achieved. A void that is less than 20% of the depth of the fill 514, and that is self-contained such that it is not open to surface or bottom, can provide acceptable performance. However, such a void can lead to manufacturing problems related to the difficulty in controlling the size of the void.

In view C, a large, open seam 508 disposed in fill 506 is pictured. The seam can trap processing materials (e.g., photoresist). Such a seam can impact hermeticity and ability to process wafers at volume. One or more cleaning processes can be used to extract such materials, resulting in desirable devices.

In view D, a large, self-contained void or seam 520 in fill 518 is pictured that can cause mechanical instability and reduce hermeticity. Again, controlling the size of the void or seam is difficult.

In view E, a thin seam 512 in fill 510 spans a length such as the entire length of the via. Such a seam can provide a path for leakage from the top of the via to the bottom of the via, which can negatively impact hermeticity and mechanical stability, such as by providing a stress riser in the device. In some instances, a via can fall out of a substrate.

In view F, a void 522 is disposed lower in the fill 524. Large seams near the bottom of a via can lead to device malfunction if a via reveal process is used. The seams can be opened during via reveal, making processing difficult and encouraging contamination. If a via reveal process is not used, a device with acceptable performance can result, however precise control can be difficult.

FIG. 6 illustrates a cross-section side-view of a device with a multi-material trench, according to an example. The device is useful to avoid void formation during formation of multi-material vias through silicon. The trench 280 can define a substantially trapezoidal cross-section as illustrated. The trench 280 can extend through the substrate 101 between a lower surface 681 of the substrate 280 and an upper surface 282 of the substrate. A top of the trench 280 can open to a top opening 383. A bottom of the trench 280 can open to a bottom opening 684. The top opening 383 can be larger in area than the bottom opening 684. One or both of the top opening and the bottom opening can be less than 30 μm across, and distance between them can be from 5 μm to 500 μm. Such sizing can improve the ability to dispose the fill 203 in the dielectric 204 without voids.

A dielectric 204, such as a layer, can be disposed on an inside surface of a trench 280. A fill 203 can be disposed in the trench, with the dielectric layer sandwiched between the fi and the substrate. The configuration can provide a hermetic seal. The seal can resist leakage with a minimum pressure differential of one atmosphere between the upper surface of the substrate and the lower surface of the substrate. Such a seal can provide a via compatible with forming a boundary to a cavity that is sealed under vacuum with respect to an ambient of the apparatus.

FIG. 7A illustrates a cross-section side-view of a device with a multi-material trench defining a perimeter, according to an example. The perimeter is pictured in FIG. 7B which is a sectional taken along line 7A-7A. A trench can be a trench defining a circuit. The trench can define a circuit in the substrate 101, with an inner portion of the substrate being in the circuit, and an outer portion surrounding the circuit. The inner portion can be dielectrically isolated from the outer portion. The trench can taper narrower in cross-section from the top opening 383 to the bottom opening 684.

A cavity 706 can be disposed in the silicon 101. The cavity can be between 0.001 μm and 1000 μm in depth. A top aperture and the mouth can be disposed within the cavity. The cavity edge to via spacing can be greater than or equal to 5 μm.

FIGS. 8A-B show across-mention side-view of a device with a multi-material trench defining a perimeter covered by a device layer, according to an example. A cap or second substrate 807 can be bonded to the first substrate 101. The second substrate 807 can be formed of single crystal silicon. The bond can include a fusion bond. The fusion bond can include at least one of a hydrophobic bond and a hydrophilic bond. The bond can include a eutectic bond, adhesive bond, or anodic bond. The second substrate can be between 2 μm and 1000 μm in thickness. The second substrate can be between 2 μm and 1000 μm in thickness.

The trench of fill 203 defines a circuit in the substrate 101, with an inner portion 809 of the substrate being in the circuit, and an outer portion 810 surrounding the circuit. With the second substrate 807 bonded to the first substrate with a hermetic seal, and the each of the vias including fill 203 sealed to the first substrate 101, the cavity 706 can be sealed, such as hermetically sealed, from an ambient atmosphere of the device.

Covering all or a portion of the cavity trench of fill 203 is a cavity 706. Motion 811 of the second substrate 807 with respect to the first substrate 101 can change the pressure of a fluid in the cavity 706. A property of this fluid, such as its capacitance or resistance, can be monitored. Such monitoring can produce a signal indicative of the motion of the second substrate 807 with respect to the first substrate 101, for example indicating a change in pressure. Such a change in pressure can indicate a number of things, including that a nearby sound pressure wave generator is producing sound energy causing motion of the second substrate 807 with respect to the first substrate 101. Altitude can also be indicated. Thus, the second substrate 807 can provide an out-of-plane sense capacitor 809. A vacuum is applied to the cavity 706 during formation such that the cavity remains under vacuum in use. In various examples, a capacitive signal can be monitored by monitoring the motion of parallel plates from one another, such as by using the contacts 102, 102 a to monitor motion of the second substrate 807 with respect to the first substrate 101.

An electrode to communicate the signal can be formed by device substrate 807 connected through a conductive substrate 101 bond to a first contact 102 coupled to the outer portion and another electrode can be formed by a second contact 102 a coupled to the inner portion of the conductive first substrate 101.

FIG. 9 illustrates a cross-section side-view of a device with a multi-material trench defining a perimeter covered by a device layer defining interdigitated fingers, according to an example. The second substrate 807 can include an in-plane motion sensor, such as a motion sensing capacitor. An example of an in-plane motion sensing capacitor is disclosed in international patent application PCT/US2011/052061, which has a priority date of Sep. 18, 2010 a common assignee, and is incorporated herein by reference in its entirety. An in-plane motion sensing capacitor is disclosed in FIGS. 2 and 11, among others in that document.

The trench of fill 203 can define a circuit in the substrate 101, with an inner portion of the substrate being in the circuit, and an outer portion surrounding the circuit. Bonded to the inner portion is a cantilevered portion 911 of the second substrate 807, forming an electrode. The cantilevered electrode can include a comb-shaped electrodes shaped to interdigitated with a comb-shaped electrode of the remainder of the second substrate 807, such as by interlacing fingers belonging to each of comb-shaped electrode. Other configurations include, but are not limited to, parallel plates, parallel beams, gap-closing interdigitated fingers, friend-field capacitors, and combinations thereof. Motion 913 of the inner portion, such as motion of the cantilevered electrode 911, can provide an out-of-plane sense capacitor, such as by changing the distance between plates of the inner electrode and the outer electrode.

An electrode to communicate the signal can be formed by device substrate 807 connected through a conductive substrate 101 bond to a first contact 102 coupled to the outer portion and another electrode can be formed by a second contact 102 a coupled to the inner portion of the conductive first substrate 101.

FIG. 10 illustrates a cross-section side-view of a device with a pressure transducer and a motion sensor, according to an example. In the example, a first cavity 1015 is configured to sense motion out of plane with the general shape of the second substrate 807. Formed as part of the second substrate 807 is the second cavity 1014 that can be used to sense configured to sense motion in the plane of the general shape of the second substrate 807. The first and second cavity can be defined by the same portions of the first 101 and second 807 substrate. One or more of the cavities 1014, 1015 can be formed in the first. One or more of the cavities 1014, 1015 can contain one or both via trenches 203, 203 a. One or more of the cavities can be part of a cavity selectively etched into a top of the semiconductor substrate 101.

FIG. 11 illustrates a cross-section side-view of a device with a cavity disposed in the device layer, according to an example. One or both of the cavities 1115, 1114 can be formed in the second substrate 807. A cavity can comprise portions of the first substrate and the second substrate, however cavity thickness can affect sensitivity, and it is important to control the thickness of the cavity. It can be easier to control thickness of the cavity if it is disposed in one of the substrates, at least because of reducing stack-up error. Furthermore, placing the cavity in substrate 101, as in FIG. 10, makes manufacturing easier as there is no need for an aligned bond (fusion, anodic, adhesive, eutectic, or otherwise).

FIG. 12 illustrates across-section side-view of a device with multiple via substrates, according to an example. A third substrate 101 a including at least one via comprising a trench of 203 can be disposed in the third substrate 101. The configuration sandwiches the second substrate 807 between two silicon substrates 101, 101 a, such as similarly formed substrates. The contacts 203-203 c can be interconnected to electronics to transmit signals generated by motion of the second substrate with respect to the first 101 and third 101 a substrates. The configuration can alter the sensitivity of the device, at least by providing two signals that can be monitored to determine the nature of motion.

FIG. 13 illustrates a cross-section side-view of a device with a cap over the device layer, according to an example. A cap 1316 can be bonded 1317 to the device layer with at least one support structure that supports the cap. The cap can be bonded to the device layer using at least one of a silicon fusion process, a conductive metal process, a glass based process or an adhesive based process. The cap can be used to form a cavity 1318. The cap can provide a hermetic seal to seal a fluid such gas in the cavity 1318. Examples can include bonding a device layer to the substrate, and a cap to the device layer, with the cap, device layer and substrate defining a hermetically sealed chamber in which portions of the device chamber can be free to vibrate at lower frequencies than either of the cap and the substrate while one of the substrate, cap and device layer can be excited. Motion of the second substrate 807 with respect to one or both of the cap and the first substrate can provide signal information to the contacts 102, 102 a that can be monitored by electronics. The cap can provide a cover to protect the second substrate 807.

FIG. 14 illustrates a cross-section side-view of a device with a cap coveting multiple devices portions of a device layer, according to an example. A cap 1418 can include a support structure 1419 that can include one or more of structures such as pillars. Bonding can include bonding the pillars to the cap and the device layer with the same bond as the bond between the cap and the device layer. The support structure 1419 can reduce motion of the cap 1418 with respect to the second substrate 807. Such a reduction can reduce signal noise transmitted to the contacts 102, 102 a such as by reducing translation of motion of the cap 1418 to motion of the second substrate 807. Further, a plurality of structures disposed between the cap and the device layer and resist bending of cap during the overmolding.

The support structures can form cavities, each sealable under different pressure and levels of hermiticity, with each cavity covering a device portion of the second substrate 807. A cavity can cover an acceleration sensor. A cavity can cover an ambient pressure sensor. A cavity can cover a gyroscope. Some or all of these can be formed out of the same first 101 and second 807 substrates.

FIG. 15 illustrates a cross-section side-view of a device with a multi-material trench, according to an example. At least one of the cavities can be coated with a conductor 1519 such as a metal and form a low resistivity electrode and electrostatic shield. Accordingly, motion of the cap 1316 with respect to the second substrate 807 can provide signal information to a contact 1520, such as when paired with monitored in conjunction with the monitoring of another contact 102 a. The cavity of the cap be disposed on a side of the second substrate 807 opposite the side bonded to the first substrate 101.

FIG. 16 illustrates a cross-section side-view of a device with a multi-material trench, according to an example. The example combines a support structure 1621 with a cavity including a conductor, so a portion of the second substrate 807 or device layer can transmit a signal such as to a conductor coupled to the cap 1418.

FIG. 17 illustrates a process illustrated by iterative views of an example semiconductor, according to an example.

At A, a wafer 1722, such as a double sided polished wafer is provided. The wafer can be formed of single crystal silicon, <100>. The wafer can be prime wafer. The water can exhibit a resistivity of 10-20 mOhm-cm. The wafer can be formed of P-type Boron or N-type Phosphorus. The wafer can have a roughness of less than or equal to 20 A. The wafer can have a total thickness variation of less than 3 μm. The wafer can be of a foundry standard thickness of greater than 200 μm.

The wafer can be subjected to a furnace pre-clean. The wafer can be subjected to a hydrofluoric acid (HF) dip. The HF dip can be followed by an RCA clean. The surface can be inspected to detect whether an SC1 clean roughens a surface of the wafer undesirably.

At B, the wafer can be thermally oxidized, such as through a wet process, growing an oxide layer 1724 of 1 μm+/−0.2 μm. The oxide can protect a non-scribe surface.

At C, a photoresist (PR) can be deposited and can be used to expose an alignment feature 1726, such as on a scribe-side of the wafer. The feature can be used to provide alignment to reduce instances of overhang of wafer edges after bond steps. Such overhang can result in edge chips and scrapped wafers. RIE etch can be applied to the oxide on scribe side (SS). The etch can stop on silicon, such as at around 1 μm. A RIE Etch of the silicon on SS can be 0.5 μm+/−0.1 μm.

At D, oxide can be stripped, such as by completely removing the oxide. A hydrofluoric acid (HF) dip can be used. A PR can be applied. A via trench 1728 can be exposed. A DRIE etch can be applied to the silicon, such as to provide a continuously tapered profile. Blow out and lip under oxide hard mask can be avoided. A less than 500 nanometer DRIE scallop can be created. If a silicon lip remains under an oxide hard mask, a two-stage DRIE can be used, including a shallow isotropic etch and a main DRIE.

At E, a polymer can be removed, and pre-furnace cleaning can be used to clean the wafer. It can be helpful to remove PR from the via trench over a long time and use a long clean. An SRD can be used to fully dry the wafers. Small water droplets that have been trapped in Vias can be removed using appropriate SRD cycle length. If droplets remain on the wafer surface, they can oxidize and create small surface protrusions during liner oxidation.

At F, the wafer can be thermally oxidized 1730, such as through a wet process, growing an oxide layer 1724 of 2 μm+/−0.2 μm. Possible oxide thickness range from 0.5 μm to 3.0 μm.

At G, low pressure chemical vapor deposition (LPCVD) can be used to deposit polysilicon 1732, such as at a thickness of 3.25 μm+/−0.4 nm. The deposit 1732 can include conformal, undoped, fine grain polysilicon deposited at from around 575 degrees Celsius to around 585 degrees Celsius. The deposition thickness can be enough to completely fill a via trench.

At H, chemical-mechanical planarization (CMP) can be used to remove polysilicon from all or a portion of the silicon, such as to expose top portions 1734 of the through-silicon-via. Removal can be directed toward the non-scribe side (NSS).

At I, chemical-mechanical planarization (CMP) can be used to remove polysilicon from all or a portion of the silicon. Removal can be directed toward the scribe side (SS). Removal can stop on the oxide layer 1738.

At J, a DRIE etch of the poly-silicon can be performed on the NSS, such as at 4 μm+/−0.5 μm. An isotropic etch can be used. The fill can be recessed below the upper surface. Depth can be measured with a profilometer.

At K, a DRIE etch of the poly-silicon can be performed on the SS, such as at 4 μm+/−0.5 μm. An isotropic etch can be used. The etch can removes stringers from the align feature 1742.

At L, the wafer can be cleaned with an O₂ wafer clean, such as to remove organic polymers. A wet oxide etch, such as of 2 μm+/−0.2 μm, can be performed, such as to remove surface oxide. The etch can recess oxide to around 1 μm below poly-Si surface. The etch can remove oxide to about 4 μm below the upper surface of the wafer, defining recesses 1740. Recesses 1744 can be define thus.

At M, a PR can be deposited and an electrode gap 1748 can be exposed on the NSS. An RIE or DRIE etch of the silicon on NSS can be performed, such as 2 μm+/−0.2 μm. The PR can be stripped, and the gap thickness can be verified with a profilometer. It can be helpful to remove PR from the via trench over a long time and use a long clean. An SRD can be used to fully dry the waters. Small water droplets that have been trapped in vias can be removed using appropriate SRI) cycle length. If droplets remain on the wafer surface, they can oxidize and create small surface protrusions during drying.

Removal of topography (particles, poly-Si, oxide, etc.) from wafer surfaces can be beneficial, such as to ensure that device function does not interfere with such topography.

FIG. 18 illustrates a process including fusion bonding, according to an example.

At A, a wafer 1850, such as a double sided polished wafer is provided. The wafer can be formed of single crystal silicon, such as with an orientation of <100>. The wafer can be prime wafer. The water can exhibit a resistivity of 10-20 mOhm-cm. The wafer can be formed of P-type Boron. The wafer can have a roughness of less than or equal to 20 A. The wafer can have a total thickness variation of less than 3 μm. The wafer can be of a foundry standard thickness of greater than 200 μm.

Pre-fusion bond activation can be applied to one or both the device and via wafers. Sulfuric acid can be used, followed by SC1 RCA clean, and finished with HF.

At B, layers can be grossly aligned. A fusion bond anneal and oxidation can be performed, such as at a temperature of at least 1100 C, with greater than 1200 C used in some examples. Oxide 1852 thickness can be created at around 1 μm+/−0.1 μm. Bond integrity can be monitored with SAM (Scanning Acoustic Microscopy) and wafer level infrared (IR).

At C, the a top substrate can be ground and a CMP can be applied to the NSS. The device layer 1854 thickness can be 60 μm+/−2 μm.

As discussed above, during certain steps, removal of topography (particles, poly-Si, oxide, etc.) from wafer surfaces can be beneficial, such as to ensure that device function does not interfere with such topography.

FIG. 19 illustrates a cross-section side-view of an optional semiconductor device configured to measure motion, according to an example. In the example, a first substrate 101 includes vias formed therethrough, with a device layer 1962 bonded thereto. The device layer 1962 includes two in-plane sensors 1972, 1974 configured to provide a signal to the contacts 1960. In the example, differential motion between the sensors produces a signal indicative of the differential motion. Accordingly, the sensors can have different mass and/or a different number or total area of electrodes. A conductor 1968 is applied to a cap 1966 that covers the sensors to create a sealed cavity. The conductor 1968 can form a part of a contact to provide differential signal information. A covering 1956 covers a portion of the contacts 1960 and a dielectric layer 1958. In an example, the contacts 1960 are built up by etching the dielectric layer over portions of the silicon 101 to be used for conducting a signal.

ADDITIONAL NOTES

The present subject matter may be described by way of several examples. Example 1 can include subject matter (such as an system, apparatus, method, tangible machine readable medium, etc.) that can include electrically isolating vias disposed in substrate that can be created in a manner so as to provide a hermetic seal between the top of the via and the bottom of the via. Optionally, the example can maintain 10 mTorr vacuum over an extended time.

In Example 2 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of Example 1 to include vias formed by deep reactive-ion etching (DRIE) trench, that can be lined with dielectric, and that can be filled with material such that there are few or no voids.

In Example 3 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 1-2 wherein the fill includes polysilicon or semiconductor and dielectric. In some examples the fill includes not just dielectric.

In Example 4 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 2-3 wherein the fill includes thermal oxide.

In Example 5 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 2-4 wherein the fill includes tetraethylorthosilicate (TEOS) or other low temperature oxide.

In Example 6 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 1-5 in which poly can be 580 degree Celsius LPCVD polysilicon, undoped (e.g., super-conformal, fine grain polysilicon).

In Example 7 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 2-6 such that a DRIE trench can be tapered in cross-section.

In Example 8 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of Example 7 such that a DRIE trench has widened mouth, or “mouth”, formed of SCS (single crystal silicon).

In Example 9 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of Example 8 wherein “mouth” can be formed via isotropic etch (e.g., plasma, XeF2, wet etch, etc., and combinations thereof) or a highly tapered DRIE etch.

In Example 10 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 1-9 wherein top and bottom critical dimensions (CDs) of trench can be less than 30 μm, and depth of etch can be 5 μm to 500 μm

In Example 11 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 2-10 wherein dielectric can be recessed below substrate surface

In Example 12 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 2-11 wherein fill can be recessed below substrate surface.

In Example 13 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 2-12 wherein the trench forms one or more loops.

In Example 14 a system or apparatus can include dielectrically isolating and hermetic sealing one or more vias in a substrate, with a cavity selectively etched into the substrate surface, the cavity encompassing at least a portion of the one or more vias.

In Example 15 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of the Example 14 wherein the cavity can be between 0.001 μm and 1000 μm in depth.

In Example 16 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 14-15, wherein one or more vias can be created first, followed by the creation of the cavity.

In Example 17 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 14-16 wherein cavity can be created first, followed by the creation of one or more vias.

In Example 18 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 14-17 wherein vias can be completely contained within the cavity.

In Example 19 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 14-19 wherein cavity edge to via spacing can be no less than 5 μm.

In Example 20 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 1-13 can be combined with any one or more of Examples 14-19.

Example 21 can include subject matter (such as an system, apparatus, method, tangible machine readable medium, etc.) that can include electrically isolating and hermetically sealing vias in a substrate (“via substrate”), with a cavity selectively etched into one or both of a substrate surface, and a second substrate (“device substrate”) that is bonded to the via substrate.

In Example 22 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of Example 21 in which one or more of the substrates can be formed of single crystal silicon (SCS).

In Example 23 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 21-22 in which at least one of the bonds includes a fusion bond. (hydrophobic, hydrophillic, etc.

In Example 24 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 21-23 in which at least one bond includes a eutectic bond, anodic bond, or adhesive bond.

In Example 25 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 21-24 in which the device substrate can be between the thicknesses of 2 μm and 1000 μm.

In Example 26 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 21-25 in which device substrate can be between the thicknesses of 2 μm and 1000 μm.

In Example 27 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 2-19 can optionally be combined with any portion or combination of any portions of any one or more of Examples 21-26.

Example 28 can include subject matter (such as an system, apparatus, method, tangible machine readable medium, etc.) that can include an out-of-plane (e.g., moving vertically) sense capacitor, wherein one electrode can be formed by a device substrate connected through a conductive wafer bond to a contact coupled to the TSV substrate inside the TSV trench, and another electrode can be formed by a contact coupled to the TSV substrate outside the TSV trench, wherein contact 1 and contact 2 can be isolated using a via described in any one of Examples 1-27.

In Example 29 can include subject matter (such as a system, apparatus, method, tangible machine readable medium, etc.) that can include an in-plane (e.g., moving horizontally) sense capacitor, e.g. a capacitor including a comb wherein one electrode can be formed by a device substrate connected through a conductive wafer bond to a contact coupled to the TSV substrate inside the TSV trench, and another electrode can be formed by a contact coupled to the TSV substrate outside the TSV trench, wherein contact 1 and contact 2 can be isolated using a via described in any one of Examples 1-27.

In Example 30 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 1-29, including in-plane and out-of plane sense capacitors fabricated on the same device substrate using TSV defined in any one of the above examples.

In Example 31 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 1-20, but with gaps fabricated on the device layer.

In Example 32 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 1-31, but with TSV on the other side of device layer.

In Example 33 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 1-32, but with TSVs on both sides of device layer.

In Example 34 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 1-33, but with a cap bonded to the other side of device substrate.

In Example 35 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 1-34 with cap bonded using silicon fusion process.

In Example 36 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 1-35 with cap bonded using conductive metal process.

In Example 37 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 1-36 with cap bonded using glass based process.

In Example 38 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 1-37 with cap bonded using adhesive based process.

In Example 39 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 1-38, but with cap having one or more cap support structures in a form of pillar, any one of which can reduce bending of cup during plastic overmolding wherein the bond between pillars and device layer can be the same as between cap and device layer.

In Example 40 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 1-39, but wherein one or more cap Support structures form cavities, each sealed under different pressure and/or different levels of hermiticity, to optimize performance of different devices, such as acceleration sensors sealed at ambient pressure and gyroscopes sealed under vacuum.

In Example 41 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 1-40, but with a cap having at least one of the cavities coated with metal to form a low resistivity electrode and electrostatic shield.

In Example 42 a system or apparatus can include, or can optionally be combined with any portion or combination of any portions of any one or more of Examples 1-41, with the consisting of 2 or more materials,

Each of these non-limiting examples can stand on its own, or can be combined in various permutations or combinations with one or more of the other examples.

The above detailed description includes references to the accompanying drawings, which form a part of the detailed description. The drawings show, by way of illustration, specific embodiments in which the invention can be practiced. These embodiments are also referred to herein as “examples,” Such examples can include elements in addition to those shown or described. However, the present inventors also contemplate examples in which only those elements shown or described are provided. Moreover, the present inventors also contemplate examples using any combination or permutation of those elements shown or described (or one or more aspects thereof), either with respect to a particular example (or one or more aspects thereof), or with respect to other examples (or one or more aspects thereof) shown or described herein.

In the event of inconsistent usages between this document and any documents so incorporated by reference, the usage in this document controls.

In this document, the terms “a” or “an” are used, as is common in patent documents, to include one or more than one, independent of any other instances or usages of “at least one” or “one or more.” In this document, the term “or” is used to refer to a nonexclusive or, such that “A or B” includes “A but not B,” “B but not A,” and “A and B,” unless otherwise indicated. In this document, the terms “including” and “in which” are used as the plain-English equivalents of the respective terms “comprising” and “wherein,” Also, in the following claims, the terms “including” and “comprising” are open-ended, that is, a system, device, article, composition, formulation, or process that includes elements in addition to those listed after such a term in a claim are still deemed to fall within the scope of that claim. Moreover, in the following claims, the terms “first,” “second,” and “third,” etc. are used merely as labels, and are not intended to impose numerical requirements on their objects.

Method examples described herein can be machine or computer-implemented at least in part. Some examples can include a computer-readable medium or machine-readable medium encoded with instructions operable to configure an electronic device to perform methods as described in the above examples. An implementation of such methods can include code, such as microcode, assembly language code, a higher-level language code, or the like. Such code can include computer readable instructions for performing various methods. The code may form portions of computer program products. Further, in an example, the code can be tangibly stored on one or more volatile, non-transitory, or non-volatile tangible computer-readable media, such as during execution or at other times. Examples of these tangible computer-readable media can include, but are not limited to, hard disks, removable magnetic disks, removable optical disks (e.g., compact disks and digital video disks), magnetic cassettes, memory cards or sticks, random access memories (RAMs), read only memories (ROMs), and the like.

The above description is intended to be illustrative, and not restrictive. For example, the above-described examples (or one or more aspects thereof) may be used in combination with each other. Other embodiments can be used, such as by one of ordinary skill in the art upon reviewing the above description. The Abstract is provided to comply with 37 C.F.R. §1.72(b), to allow the reader to quickly ascertain the nature of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims. Also, in the above Detailed Description, various features may be grouped together to streamline the disclosure. This should not be interpreted as intending that an unclaimed disclosed feature is essential to any claim. Rather, inventive subject matter may lie in less than all features of a particular disclosed embodiment. Thus, the following claims are hereby incorporated into the Detailed Description as examples or embodiments, with each claim standing on its own as a separate embodiment, and it is contemplated that such embodiments can be combined with each other in various combinations or permutations. The scope of the invention should be determined with reference to the appended claims, along with the full scope of equivalents to which such claims are entitled. 

What is claimed is:
 1. An apparatus comprising: a substrate including at least one via disposed in the substrate, the substrate including: a trench having sidewalls defining a substantially trapezoidal cross-section, the trench extending through the substrate between a lower surface of the substrate and an upper surface of the substrate, wherein a top of the trench opens to a top opening, and a bottom of the trench opens to a bottom opening, the top opening being larger than the bottom opening; and a mouth surrounding the top opening of the trench and in fluid communication with the top opening of the trench, the mouth including sidewalls that extend from the upper surface of the substrate to the top opening of the trench, wherein a mouth opening in the upper surface of the substrate is larger than the top opening of the trench, if each sidewall of the trench was extended to the upper surface of the substrate, the sidewalls of the mouth are non-vertical, and wherein the at least one via includes: a dielectric layer disposed on an inside surface of a trench; and a fill disposed in the trench, with the dielectric layer sandwiched between the fill and the substrate.
 2. The apparatus of claim 1, wherein the substrate is formed of single crystal silicon.
 3. The apparatus of claim 1, wherein the fill and the dielectric are sealed to the substrate hermetically.
 4. The apparatus of claim 1, wherein the trench defines a circuit in the substrate, with an inner portion of the substrate being in the circuit, and an outer portion surrounding the circuit.
 5. The apparatus of claim 4, wherein the trench tapers narrower in cross-section from the top opening to the bottom opening.
 6. The apparatus of claim 4, wherein the inner portion is dielectrically isolated from the outer portion.
 7. The apparatus of claim 1, wherein the via is substantially void free.
 8. The apparatus of claim 1, wherein the fill includes at least one of polysilicon or a combination of semiconductor and dielectric.
 9. The apparatus of claim 1, wherein the dielectric is recessed below substrate surface.
 10. The apparatus of claim 1, wherein the fill is recessed below the upper surface.
 11. An apparatus comprising: a substrate including at least one via disposed in the substrate, the substrate including: a trench having sidewalls defining a substantially trapezoidal cross-section, the trench extending through the substrate between a lower surface of the substrate and an upper surface of the substrate, wherein a top of the trench opens to a top opening, and a bottom of the trench opens to a bottom opening, the top opening being larger than the bottom opening; and a mouth surrounding the top opening of the trench and in fluid communication with the top opening of the trench, the mouth includes sidewalls that extend from the upper surface of the substrate to the top opening of the trench, wherein: a mouth opening in the upper surface of the substrate is larger than the top opening of the trench, if each sidewall of the trench was extended to the upper surface of the substrate, the sidewalls of the mouth are non-vertical, and a second substrate bonded to the substrate; and wherein the at least one via includes: a dielectric layer disposed on an inside surface of a trench; and a fill disposed in the trench, with the dielectric layer sandwiched between the fill and the substrate.
 12. The apparatus of claim 11, wherein the trench defines a circuit in the substrate, with an inner portion of the substrate being in the circuit, and an outer portion surrounding the circuit, and wherein the second substrate includes an out-of-plane sense capacitor, wherein one electrode is formed by a device substrate connected through a conductive substrate bond to a first contact coupled to the inner portion and another electrode is formed by a second contact coupled to the outer portion.
 13. The apparatus of claim 11, wherein the trench defines a circuit in the substrate, with an inner portion of the substrate being in the circuit, and an outer portion surrounding the circuit, and wherein the second substrate includes an in-plane sense capacitor, wherein one electrode is formed by a device substrate connected through a conductive substrate bond to a first contact coupled to the inner portion and another electrode is formed by a second contact coupled to the outer portion.
 14. The apparatus of claim 13, wherein the in-plane sense capacitor includes a comb including interdigitated fingers.
 15. The apparatus of claim 13, wherein the trench defines a circuit in the substrate, with an inner portion of the substrate being in the circuit, and an outer portion surrounding the circuit, and wherein the second substrate includes an out-of-plane sense capacitor, wherein one electrode is formed by the device substrate connected through the conductive substrate bond to the first contact coupled to the inner portion and the other electrode is formed by the second contact coupled to the outer portion.
 16. The apparatus of claim 11, comprising a third substrate including at least one via disposed in the third substrate, wherein the third substrate comprises: a trench having a substantially trapezoidal cross-section, the trench extending through the third substrate between a lower surface of the third substrate and an upper surface of the third substrate, wherein the top of the trench opens to a top opening, and the bottom of the trench opens to a bottom opening, the top opening being larger than the bottom opening; and a mouth surrounding the top opening and extending between the upper surface and the top opening, wherein a mouth opening in the upper surface is larger than the top opening of the trench, and wherein the via comprises: a dielectric layer disposed on an inside surface of a trench; and a fill disposed in the trench, with the dielectric layer sandwiched between the fill and the third substrate.
 17. The apparatus of claim 11, comprising a cap bonded to an opposite side of second substrate bonded to the second substrate with at least one support structure that supports the cap.
 18. The apparatus of claim 17, wherein the support structure is one of a plurality of support structures and includes a pillar.
 19. The apparatus of claim 18, wherein the plurality of support structures form cavities, each sealable under different pressure and/or different levels of hermiticity, with each cavity covering a device portion of the second substrate.
 20. The apparatus of claim 19, wherein a first cavity covers an acceleration sensor, a second cavity covers an ambient pressure and a third cavity covers a gyroscope.
 21. The apparatus of claim 11, wherein the trench defines a circuit in the substrate, with an inner portion of the substrate being in the circuit, and an outer portion surrounding the circuit.
 22. The apparatus of claim 21, wherein the inner portion is dielectrically isolated from the outer portion.
 23. The apparatus of claim 11, wherein the upper surface is part of a cavity selectively etched into a top of the semiconductor substrate.
 24. The apparatus of claim 23, wherein the top opening and the mouth are disposed within the cavity.
 25. The apparatus of claim 23, wherein the cavity includes a cavity edge, and wherein the cavity edge to via spacing is no less than 5 μm.
 26. An apparatus comprising: a substrate including at least one via disposed in the substrate, the substrate including: a trench having sidewalls defining a substantially trapezoidal cross-section, the trench extending through the substrate between a lower surface of the substrate and an upper surface of the substrate, wherein a top of the trench opens to a top opening, and a bottom of the trench opens to a bottom opening, the top opening being larger than the bottom opening; and a mouth surrounding the top opening of the trench and in fluid communication with the top opening of the trench, the mouth including sidewalls that extend from the upper surface of the substrate to the top opening of the trench, wherein a mouth opening in the upper surface of the substrate is larger than the top opening of the trench, if each sidewall of the trench was extended to the upper surface of the substrate, the sidewalls of the mouth are curved, and the at least one via includes: a dielectric layer disposed on an inside surface of a trench; and a fill disposed in the trench, with the dielectric layer sandwiched between the fill and the substrate. 